NbTiN is a superconductor with a $T_c = 16-18 K $ and a critical field of $B = 13 T$ in the NaCL-phase \cite{Yen1967}. It is commonly used as thin-film in superconducting devices were we observer a $T_C > 9 \mathrm{K}$.
Jia2015
Alloy with 43 wt. % Ti and 53 wt. % Nb. $5 \mathrm{nm}$ to $20 \mathrm{nm}$ on MgO and Si and SiOx-Si substrates using DC magnetron sputtering. By adding Ti to NbN resistivity and kinetic inductance is lowered, improving the performance citing \cite{Mike2009}. NbN and NbTiN has a cubic structure with a smaller lattice with Ti. Analyzing the composition:
Smaller lattice mismatch to MgO Nb: $5.9\%$, NbTiN: $4\%$ \cite{Mike2009}, NbTiN: $2.9\%$. No measurement conducted on detectors.
Zhang2015b
NbTiN (4-100 nm) on MgO by reactive DC magnetron sputtering. With high superconducting critical temperature of 10.1 K, low resistivity (q20ΒΌ93 lXcm), and residual resistivity ratio of 1.12 achieved for 4-nm-thick ultrathin NbTiN films prepared at the deposition current of 2.4 A. At a NaCl structure, in which the metallic atoms form a face-centered cubic lattice and the nonmetallic atoms occupy all octahedral interstices. The chemical composition varies with the film thickness.
Analyzing the composition:
Shan2015
Sputtering pressure influences film resistivity but not the superconducting properties such as T_c and gap energy. Q factor for resonators independent of normal state resistivity. Coplanar waveguides (CPW) have a higher Q than the stacked structure.